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Picosecond laser ablation of SiO2layers on silicon substrates
Sonja Hermann, Nils-Peter Harder, Rolf Brendel, Dirk Herzog, Heinz HaferkampVolume:
99
Language:
english
Pages:
8
DOI:
10.1007/s00339-009-5464-z
Date:
April, 2010
File:
PDF, 821 KB
english, 2010