Limits on thinning of boron layers with/without metal...

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Limits on thinning of boron layers with/without metal contacting in PureB Si (photo)diodes

Knezevic, Tihomir, Liu, Xingyu, Hardeveld, Erwin, Suligoj, Tomislav, Nanver, Lis K.
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Year:
2019
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2019.2910465
File:
PDF, 859 KB
english, 2019
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