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Ablation of microstructures applying diffractive elements and UV femtosecond laser pulses
J. J. J. Kaakkunen, J. Bekesi, J. Ihlemann, P. SimonVolume:
101
Language:
english
Pages:
5
DOI:
10.1007/s00339-010-5824-8
Date:
November, 2010
File:
PDF, 704 KB
english, 2010