Uniformity study of wafer-scale InP-to-silicon hybrid integration
Di Liang, David C. Chapman, Youli Li, Douglas C. Oakley, Tony Napoleone, Paul W. Juodawlkis, Chad Brubaker, Carl Mann, Hanan Bar, Omri Raday, John E. BowersVolume:
103
Language:
english
Pages:
6
DOI:
10.1007/s00339-010-5999-z
Date:
April, 2011
File:
PDF, 1.59 MB
english, 2011