Fabrication of uniform nanogrooves on 6H-SiC by femtosecond...

Applied Physics A: Materials Science & Processing 2011 / 01 Vol. 102; Iss. 1

Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation

Sung Hoon Kim, Ik-Bu Sohn, Sungho Jeong
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Volume:
102
Language:
english
Pages:
5
DOI:
10.1007/s00339-010-6077-2
Date:
January, 2011
File:
PDF, 709 KB
english, 2011
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