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Thermally driven multi-layer actuator for 2D cantilever arrays
Y. Sarov, T. Ivanov, A. Frank, I. W. RangelowVolume:
102
Language:
english
Pages:
8
DOI:
10.1007/s00339-010-6078-1
Date:
January, 2011
File:
PDF, 906 KB
english, 2011