Self-organized patterning on Si(001) by ion sputtering with

Applied Physics A: Materials Science & Processing 2011 / 03 Vol. 102; Iss. 3

Self-organized patterning on Si(001) by ion sputtering with

Marina Cornejo, Bashkim Ziberi, Christoph Meinecke, Dietmar Hirsch, Jürgen W. Gerlach, Thomas Höche, Frank Frost, Bernd Rauschenbach
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Volume:
102
Language:
english
Pages:
7
DOI:
10.1007/s00339-011-6246-y
Date:
March, 2011
File:
PDF, 1.03 MB
english, 2011
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