Fabrication of a hydrophobic three-dimensional hybrid structure using an UV-curable electron beam resist
Goto, Kohei, Okabe, Takao, Taniguchi, JunVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0890
Date:
June, 2019
File:
PDF, 1.39 MB
english, 2019