Ablation of polymers by focused EUV radiation from a...

Applied Physics A: Materials Science & Processing 2011 / 10 Vol. 105; Iss. 1

Ablation of polymers by focused EUV radiation from a table-top laser-produced plasma source

Frank Barkusky, Armin Bayer, Klaus Mann
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
105
Language:
english
Pages:
7
DOI:
10.1007/s00339-011-6540-8
Date:
October, 2011
File:
PDF, 785 KB
english, 2011
Conversion to is in progress
Conversion to is failed