Dielectric properties of thin-film ZrO2up to 50 GHz for RF MEMS switches
Deokki Min, Nils Hoivik, Geir Uri Jensen, Frode Tyholdt, Camilla Haavik, Ulrik HankeVolume:
105
Language:
english
Pages:
8
DOI:
10.1007/s00339-011-6582-y
Date:
December, 2011
File:
PDF, 610 KB
english, 2011