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Correlation between implantation defects and dopants in Fe-implanted SiC
A. Declémy, A. Debelle, C. Dupeyrat, L. Thomé, I. Monnet, D. EyidiVolume:
106
Language:
english
Pages:
7
DOI:
10.1007/s00339-011-6660-1
Date:
March, 2012
File:
PDF, 651 KB
english, 2012