Study of phase separation in Ti-Co-N thin films on silicon...

Applied Physics A: Materials Science & Processing 1997 / 05 Vol. 64; Iss. 5

Study of phase separation in Ti-Co-N thin films on silicon substrate

D.G. Gromov, A.I. Mochalov, V.P. Pugachevich, E.P. Kirilenko, A.Y. Trifonov
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Volume:
64
Language:
english
Pages:
5
DOI:
10.1007/s003390050510
Date:
May, 1997
File:
PDF, 170 KB
english, 1997
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