The effect of random dopant fluctuations on the minimum...

The effect of random dopant fluctuations on the minimum channel length of short-channel MOS transistors

T. Mikolajick, V. Häublein, H. Ryssel
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Volume:
64
Language:
english
Pages:
6
DOI:
10.1007/s003390050516
Date:
June, 1997
File:
PDF, 354 KB
english, 1997
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