Studies of interface structures of W films grown on...

Applied Physics A: Materials Science & Processing 1997 / 09 Vol. 65; Iss. 3

Studies of interface structures of W films grown on patterned and bare Si(100) by TEM

Yusuf Atici
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Volume:
65
Language:
english
Pages:
8
DOI:
10.1007/s003390050584
Date:
September, 1997
File:
PDF, 1.36 MB
english, 1997
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