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Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation
F. Sánchez, J.L. Morenza, R. Aguiar, J.C. Delgado, M. VarelaVolume:
66
Language:
english
Pages:
4
DOI:
10.1007/s003390050641
Date:
January, 1998
File:
PDF, 353 KB
english, 1998