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Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films, as investigated with optical in situ diagnostics
A. von Keudell, M. Meier, T. Schwarz-SelingerVolume:
72
Language:
english
Pages:
6
DOI:
10.1007/s003390100813
Date:
May, 2001
File:
PDF, 540 KB
english, 2001