The relationship between the macroscopic properties of PECVD silicon nitride and oxynitride layers and the characteristics of their networks
M. Klanjšek Gunde, M. MačekVolume:
74
Language:
english
Pages:
6
DOI:
10.1007/s003390100932
Date:
February, 2002
File:
PDF, 529 KB
english, 2002