Potential Precursor Alternatives to the Pyrophoric...

Chemistry - A European Journal 2019 / 04

Potential Precursor Alternatives to the Pyrophoric Trimethyl Aluminium for the Atomic Layer Deposition of Aluminium Oxide

Mai, Lukas, Boysen, Nils, Zanders, David, de los Arcos, Teresa, Mitschker, Felix, Mallick, Bert, Grundmeier, Guido, Awakowicz, Peter, Devi, Anjana
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Journal:
Chemistry – A European Journal
DOI:
10.1002/chem.201901358
Date:
April, 2019
File:
PDF, 7.58 MB
2019
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