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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
Smyrnakis, Athanasios, Zeniou, Angelos, Awsiuk, Kamil, Constantoudis, Vassilios, Gogolides, EvangelosLanguage:
english
Journal:
Frontiers of Chemical Science and Engineering
DOI:
10.1007/s11705-019-1809-0
Date:
April, 2019
File:
PDF, 3.29 MB
english, 2019