Growth and characterization of F-doped α-Ga2O3 thin films...

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Thin Solid Films 2019 / 4

Growth and characterization of F-doped α-Ga2O3 thin films with low electrical resistivity

Morimoto, Shota, Nishinaka, Hiroyuki, Yoshimoto, Masahiro
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.04.051
Date:
April, 2019
File:
PDF, 4.00 MB
english, 2019
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