Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator
Ou, Chuan-Hui, Lin, Yu-Ching, Keikoin, Yoshiteru, Ono, Takahito, Esashi, Masayoshi, Tsai, Yao-ChuanVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0493
Date:
June, 2019
File:
PDF, 1.03 MB
english, 2019