Effect of counter-surface chemistry on defect-free material...

Wear 2019 / 04 Vol. 426-427

Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon

Xiao, Chen, Chen, Cheng, Wang, Hongbo, Chen, Lei, Jiang, Liang, Yu, Bingjun, Qian, Linmao
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Volume:
426-427
Language:
english
Journal:
Wear
DOI:
10.1016/j.wear.2019.01.093
Date:
April, 2019
File:
PDF, 1.68 MB
english, 2019
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