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Formation of Nanoporous Copper-Silicide Films
Buchin, E. Yu., Naumov, V. V., Vasilyev, S. V.Volume:
53
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782619030059
Date:
March, 2019
File:
PDF, 1.33 MB
english, 2019