Magnetron sputtering deposition of Zn/AZO multilayer films:...

Results in Physics 2019 / 06 Vol. 13

Magnetron sputtering deposition of Zn/AZO multilayer films: Towards the understanding of Zn diffusion in AZO film

Liu, Yang, Zhu, Siming, Song, Baokun
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Volume:
13
Journal:
Results in Physics
DOI:
10.1016/j.rinp.2019.102286
Date:
June, 2019
File:
PDF, 2.13 MB
2019
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