Formation of InAs quantum dots in silicon by sequential ion implantation and flash lamp annealing
S. Prucnal, M. Turek, A. Drozdziel, K. Pyszniak, S. Q. Zhou, A. Kanjilal, W. Skorupa, J. ZukVolume:
101
Language:
english
Pages:
5
DOI:
10.1007/s00340-010-4140-5
Date:
October, 2010
File:
PDF, 507 KB
english, 2010