![](/img/cover-not-exists.png)
Laser-produced plasma EUV source based on tin-rich, thin-layer
R. Rakowski, J. Mikołajczyk, A. Bartnik, H. Fiedorowicz, F. de Gaufridy de Dortan, R. Jarocki, J. Kostecki, M. Szczurek, P. WachulakVolume:
102
Language:
english
Pages:
9
DOI:
10.1007/s00340-010-4193-5
Date:
March, 2011
File:
PDF, 1.54 MB
english, 2011