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Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
Bleykher, G A, Sidelev, D V, Grudinin, V A, Krivobokov, V P, Yuryeva, A VVolume:
1115
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1115/3/032065
Date:
November, 2018
File:
PDF, 1.74 MB
2018