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Applications of energy dependent backscatter yield variations at low voltage
Boese, Markus, Sempf, Kerstin, Zhou, Fang, Thesen, AlexanderVolume:
21
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615007138
Date:
August, 2015
File:
PDF, 285 KB
2015