Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum...

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Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection

Pinto, Rui M. R., Brito, Pedro, Chu, Virginia, Conde, Joao Pedro
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Year:
2019
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2911666
File:
PDF, 43 KB
2019
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