Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection
Pinto, Rui M. R., Brito, Pedro, Chu, Virginia, Conde, Joao PedroYear:
2019
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2911666
File:
PDF, 43 KB
2019