[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Formation of ultrashallow junctions less than 10nm with the combination of low energy B ion implantation and laser annealing
Yamada, Ryuta, Seto, Singo, Sato, Sosi, Tanaka, Yuki, Matumoto, Satoru, Suzuki, Toshiharu, Fuse, Gensyu, Kudo, Tosio, Sakuragi, SusumuVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401451
File:
PDF, 693 KB
english, 2006