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Surface-tensile-stress induced polishing-voids in cross-point phase-change-memory cells: corrosion mechanism and solution
Kim, Soo-Bum, Cui, Hao, Cho, Jong-Young, Seo, Eun-Bin, Yoon, Sang-Su, Son, Young-Hye, Jeong, Gi-Ppeum, Bae, Jae-Young, Park, Jin-Hyung, Park, Jea-GunVolume:
34
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab13ca
Date:
June, 2019
File:
PDF, 1.24 MB
english, 2019