Penetration depth variation in atomic layer deposition on...

Penetration depth variation in atomic layer deposition on multiwalled carbon nanotube forests

Kane, David, Davis, Robert, Vanfleet, Richard
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Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5085051
Date:
May, 2019
File:
PDF, 2.21 MB
2019
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