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Highly Reliable Contacts to Silicon Enabled by Low Temperature Sputtered Graphenic Carbon
Stelzer, Max, Jung, Moritz, Wurstbauer, Ursula, Holleitner, Alexander, Kreupl, FranzVolume:
7
Year:
2019
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2019.2894975
File:
PDF, 37 KB
english, 2019