![](/img/cover-not-exists.png)
Understanding Thickness Uniformity of Ga 2 O 3 Thin Films Grown by Mist Chemical Vapor Deposition
Ha, Minh-Tan, Kim, Kyoung-Ho, Kwon, Yong-Jin, Kim, Cheol-Jin, Jeong, Seong-Min, Bae, Si-YoungVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0381907jss
File:
PDF, 1.25 MB
english, 2019