Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 05 Vol. 37; Iss. 3
![](/img/cover-not-exists.png)
Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters
Liao, Jyun-Hao, Wang, Wen, Chen, Chien-Ju, Yu, Chia-Jui, Wu, Meng-ChyiVolume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5085259
Date:
May, 2019
File:
PDF, 1.82 MB
2019