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Influence of nitrogen partial pressure on optical properties of magnetron sputtered Al-Si-N thin films
Soni,, Mishra, S.K., Sharma, S.K.Volume:
682
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.05.006
Date:
July, 2019
File:
PDF, 2.76 MB
english, 2019