Reduction of Copper Oxide Films by an Atmospheric-Pressure...

Reduction of Copper Oxide Films by an Atmospheric-Pressure Inductively Coupled Plasma Microjet

Tajima, Satomi, Tsuchiya, Shouichi, Matsumori, Masashi, Nakatsuka, Shigeki, Ichiki, Takanori
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Volume:
35
Year:
2010
Language:
english
Journal:
Transactions of the Materials Research Society of Japan
DOI:
10.14723/tmrsj.35.621
File:
PDF, 481 KB
english, 2010
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