Observations of the initial stages on reactive gas-timing...

Optical Materials 2019 / 06 Vol. 92

Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery

Chittinan, D., Buranasiri, P., Lertvanithphol, T., Eiamchai, P., Patthanasettakul, V., Chananonnawathorn, C., Limwichean, S., Nuntawong, N., Klamchuen, A., Muthitamongkol, P., Limsuwan, P., Chindaudom
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Volume:
92
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2019.04.040
Date:
June, 2019
File:
PDF, 3.83 MB
2019
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