An evaluation of Fuchs-Sondheimer and Mayadas-Shatzkes...

AIP Advances 2019 / 02 Vol. 9; Iss. 2

An evaluation of Fuchs-Sondheimer and Mayadas-Shatzkes models below 14nm node wide lines

Smith, R. S., Ryan, E. T., Hu, C.-K., Motoyama, K., Lanzillo, N., Metzler, D., Jiang, L., Demarest, J., Quon, R., Gignac, L., Breslin, C., Giannetta, A., Wright, S.
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Volume:
9
Journal:
AIP Advances
DOI:
10.1063/1.5063896
Date:
February, 2019
File:
PDF, 3.27 MB
2019
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