Design and Characterization of a Micro-Fabricated...

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IEEE Sensors Journal 2019

Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

Wood, Graham S., Torin, Alberto, Al-mashaal, Asaad K., Smith, Leslie S., Mastropaolo, Enrico, Newton, Michael J., Cheung, Rebecca
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Year:
2019
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2019.2914401
File:
PDF, 7.12 MB
2019
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