Low frequency piezoelectric P(VDF-TrFE) micro-cantilevers...

Smart Materials and Structures 2019 / 06 Vol. 28; Iss. 6

Low frequency piezoelectric P(VDF-TrFE) micro-cantilevers with a novel MEMS process for vibration sensor and energy harvester applications

K R, Rashmi, Rao, Arjun Sunil, A, Jayarama, Pinto, Richard
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Volume:
28
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/1361-665X/ab19d2
Date:
June, 2019
File:
PDF, 954 KB
english, 2019
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