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Azimuthal inhomogeneities of axially symmetric rf discharge plasma in arc-shaped magnetic field
Filippov, A V, Pal, A F, Ryabinkin, A N, Serov, A OVolume:
1147
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1147/1/012116
Date:
January, 2019
File:
PDF, 1.37 MB
2019