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Nonlinear electrostatic effects in MEMS ring-based rate sensors under shock excitation
Sieberer, Stefan, McWilliam, Stewart, Popov, Atanas A.Volume:
157-158
Language:
english
Journal:
International Journal of Mechanical Sciences
DOI:
10.1016/j.ijmecsci.2019.04.028
Date:
July, 2019
File:
PDF, 2.16 MB
english, 2019