Nonlinear electrostatic effects in MEMS ring-based rate...

International Journal of Mechanical Sciences 2019 / 07 Vol. 157-158

Nonlinear electrostatic effects in MEMS ring-based rate sensors under shock excitation

Sieberer, Stefan, McWilliam, Stewart, Popov, Atanas A.
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Volume:
157-158
Language:
english
Journal:
International Journal of Mechanical Sciences
DOI:
10.1016/j.ijmecsci.2019.04.028
Date:
July, 2019
File:
PDF, 2.16 MB
english, 2019
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