Design, test and analysis of a threshold-value judging mechanism in silicon-based MEMS safety and arming device
Feng, Hengzhen, Lou, Wenzhong, Wang, Dakui, Zheng, FuquanVolume:
29
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab1622
Date:
June, 2019
File:
PDF, 4.07 MB
english, 2019