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Effect of the varied nitrogen vacancy concentration on mechanical and electrical properties of ZrNx thin films
Pei, Chenrui, Deng, Lijun, Xiang, Chengjie, Zhang, Sam, Sun, DeenLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.05.023
Date:
May, 2019
File:
PDF, 608 KB
english, 2019