PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications
Ahmad, Mansoor, Bozkurt, Ayhan, Farhanieh, OmidVolume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10050319
Date:
May, 2019
File:
PDF, 6.89 MB
english, 2019