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Study on micro-grinding quality in micro-grinding tool for single crystal silicon
Ren, Yinghui, Li, Chenfang, Li, Wei, Li, Maojun, Liu, HuiVolume:
42
Language:
english
Journal:
Journal of Manufacturing Processes
DOI:
10.1016/j.jmapro.2019.04.030
Date:
June, 2019
File:
PDF, 4.25 MB
english, 2019