Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure
Sugathan, Bijoy, Nilaya, J. Padma, Pillai, V. P. Mahadevan, Biswas, Dhruba J.Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5052053
Date:
November, 2018
File:
PDF, 8.99 MB
english, 2018