Micro-Scale Chiplets Position Control

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Journal of Microelectromechanical Systems 2019

Micro-Scale Chiplets Position Control

Matei, Ion, Nelaturi, Saigopal, Chow, Eugene M., Lu, Jeng Ping, Bert, Julie A., Crawford, Lara S.
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Year:
2019
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2914045
File:
PDF, 51 KB
english, 2019
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