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Active Region Formation of Nanoelectromechanical (NEM) Devices for Complementary-Metal-Oxide-Semiconductor-NEM Co-Integration
Cha, Tae Min, Jo, Hyun Chan, Kwon, Hyug Su, Choi, Woo YoungVolume:
19
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2019.16988
Date:
October, 2019
File:
PDF, 13.13 MB
english, 2019